An Ultra High Purity (UHP) Gas System is a specialized gas delivery infrastructure designed to handle and supply gases with extremely low levels of contamination—often in the parts-per-billion (ppb) or even parts-per-trillion (ppt) range. These systems are critical in environments where even the slightest impurity can affect product quality or process outcomes.
💡 What is an Ultra High Purity (UHP) Gas System?
A UHP gas system ensures that gases are delivered to process tools or labs with minimal contamination from moisture, oxygen, hydrocarbons, particles, or metals. The system includes high-quality components, rigorous leak testing, and cleanroom-compatible installation practices.
| Industry | Application Example |
|---|---|
| Semiconductors | Etching, doping, deposition (CVD/ALD), lithography |
| Pharmaceuticals | Inerting, synthesis, fermentation |
| Laboratories | Spectrometry, gas chromatography, analytical research |
| Solar / PV | Thin-film deposition, cell doping processes |
| LED / Optoelectronics | MOCVD systems and epitaxial growth processes |
🧪 Key Gases Used in UHP Systems
Inert gases: Nitrogen (N₂), Argon (Ar), Helium (He)
Reactive gases: Hydrogen (H₂), Ammonia (NH₃), Silane (SiH₄), Phosphine (PH₃)
Oxidizing gases: Oxygen (O₂), Nitrous oxide (N₂O)
Toxic / corrosive gases: Hydrogen chloride (HCl), Arsine (AsH₃), Boron trifluoride (BF₃)
🧱 Components of a UHP Gas Delivery System
| Component | Description |
|---|---|
| UHP Valves & Regulators | Made from electropolished stainless steel with VCR/diaphragm seals |
| Gas Cabinets | Enclosed safety cabinets with automatic shutdown and purge systems |
| Tubing & Fittings | Orbital welded 316L stainless steel tubing with <10 Ra µin surface finish |
| Purifiers | Remove O₂, H₂O, CO₂, hydrocarbons, and particles |
| Mass Flow Controllers (MFCs) | Precisely control gas flow to process tools |
| Pressure Transducers & Alarms | Monitor system integrity and pressure variations |
| Automatic Switchover Panels | Provide uninterrupted gas supply during cylinder changeover |
📋 System Design Considerations
Cleanroom-grade assembly.
Leak-free connections (VCR, orbital welding).
Purging with inert gas (usually N₂ or Ar).
Remote monitoring and automation.
Pressure relief and safety shutoff systems.
Compliance with SASO standards and local safety codes.
Al Fateh Systems is a professional service provider in laboratory turnkey solutions, we offer concept to commissioning package of work in compliance with all international standards.
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